Hi,
I need to etch Titanium in my device using a safe wet etch chemistry.  I
understand that HF is normally used to etch titanium films but this chemical is
too dangerous.  Can anyone suggest a safer wet etch chemistry?  Can I use
NH4OH:H2O2 chemistry to etch titanium?

Mr. Jeffrey Mun Pun YUE
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Division of Bioengineering
Block E3, #05-18, Nanobioanalytics Lab
9 Engineering Drive 1
National University of Singapore
Singapore 117576
Tel: (65) 65165985, Fax: (65) 68723069
E-mail:  g0500396@nus.edu.sg