Try a metal that forms a native oxide, e.g. chrome or titanium. -Mike Martin >>> "Leyla Soleymani"3/5/2007 1:28 PM >>> Hi, I would like to use electron beam evaporation in order to evaporate silica on a gold substrate for isolation purposes. I have tried this but I did not get adhesion between SiO2 and gold. Does anyone have any suggestions to what adhesion layer and how much of it I should use in order to acheive an SiO2 layer of 100 nm on sputtered gold. I do not have a CVD system so i need to use thermal evaporation.