Hello,

just apply a drop of water on the side between the two layers.
The water will stick the layers together by adhesion......

Regards

Marc

-----Ursprüngliche Nachricht-----
Von: Rupesh Sawant [mailto:rupesh.sawant@gmail.com]
Gesendet: Montag, 5. März 2007 20:58
An: General MEMS discussion
Betreff: [mems-talk] Glass Thermal Bonding


I am trying to bond glass slides thermally. But I am facing problem in
transferring the aligned glass slide to the furnace. My procedure of
alignment is as follows:

I stick the glass slide having integrated electrodes on it to a plane
square glass plate. This plate is then fixed in position of the glass
mask in the aligner.
The slide having the channels is kept on the wafer stage of the
aligner and the alignment is done.
But after the alignment I need to transfer the slides to a furnace
nearby. How do i take the aligned slide (no bonded yet) to the
furnace. Can someone suggest me a technique to hold the aligned slides
temporarily in place till I put them in furnace.