Don't bake over 100 deg before exposure - 95 deg is better
Shay

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of yitianp@email.arizona.edu
Sent: Tuesday, March 13, 2007 6:12 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] hi for help about the develop

 I spin S1813 at 4000rpm 45s.
Then hot bake 120Degree 10min
Exposure 10s, then develop 30s.After 30s, I can't see anything.
Why???
All paper recommend the develop time 30s.