Thank you very much.
I exposed at 8.8mw/cm2 about 10s
What problem may be when the temperature is more than 100degree??

Quoting Shay Kaplan :

> Don't bake over 100 deg before exposure - 95 deg is better
> Shay
>
> -----Original Message-----
> From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
> On Behalf Of yitianp@email.arizona.edu
> Sent: Tuesday, March 13, 2007 6:12 AM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] hi for help about the develop
>
>  I spin S1813 at 4000rpm 45s.
> Then hot bake 120Degree 10min
> Exposure 10s, then develop 30s.After 30s, I can't see anything.
> Why???
> All paper recommend the develop time 30s.