On a high temp bake, the photo active compound changes Shay

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of yitianp@email.arizona.edu
Sent: Wednesday, March 14, 2007 2:20 AM
To: mems-talk@memsnet.org
Subject: RE: [mems-talk] hi for help about the develop

Thank you very much.
I exposed at 8.8mw/cm2 about 10s
What problem may be when the temperature is more than 100degree??