durusmail: mems-talk: use of LAM 4500
use of LAM 4500
2007-03-21
2007-03-22
use of LAM 4500
naitbouda
2007-03-21
Hi all

Does anyone know bout the use of the 25 mil domed grooved of the lower
electrode in the equipment of LAM 4500 RIE etcher(oxyde etcher) Thanks,

A.Naitbouda
anaitbouda@cdta.dz

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