durusmail: mems-talk: Polyimide wet etching
Polyimide wet etching
2007-03-26
Polyimide wet etching
Alter
2007-03-26
I want to try wet etching of Polyimide and I am looking for feedback
regarding limitations of this method. Is it possible to control the
angle of sidewalls in wet-etched channels? I would like to have vertical
walls but I am not sure which etchant (if any) could do this. Is there a
limitation on the width/depth ratio of the wet-etched channel? Ideally
I'd love to have a channel with the square cross-section (1:1 ratio).
I would be grateful for any tips and hints on Polyimide wet etching you
could give me.

Thanks
Alex
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