durusmail: mems-talk: Spin coating PDMS on wafer
Spin coating PDMS on wafer
2007-03-26
2007-03-27
2007-03-26
2007-03-27
Spin coating PDMS on wafer
Lee, Hyung-Kew
2007-03-27
Hi, I published a paper including data about spincoating of PDMS.
Refer to this paper.

A Flexible Polymer Tactile Sensor, JMEMS Vol. 15 No. 6, Dec 2006, p1681

I hope this is useful.

Hyungkew Lee

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