If you've gotten desperate, here's what you do.

Since you're using gold and chrome, you can dip it in Piranha (4 parts
H2SO4 : 1 part 30% H2O2).

Piranha does not attack chrome or gold very much. In fact, some labs use
piranha to clean their chrome masks.

After a minute or two, all the leftover resist should be gone.

No guarantees are implied that this will not disturb or destroy  your
device.
Make sure to rinse it a good long while (5 minutes), and inspect it
thoroughly (especially around corners) after the process.

Let us know how it turns out.

Jesse Fowler


"Yue Mun Pun, Jeffrey" 
Sent by: mems-talk-bounces@memsnet.org

Subject [mems-talk] RE: Patterning Gold heaters on glass

Hi,
Can anyone help me on this?

In addition to what I did below, using ultrasonic treatment, I had also
tried to heat the substrate in AZ300 stripper at 80-90'C and again treated
the substrate with sonication.  Hoowever, some of the gold-coated resist
still remain on the glass wafer.