I am using EVG 624 for exposure. the power wattage of the bulb is 12mW/cm^2.


On 3/30/07, Gareth Jenkins  wrote:
>
> What are you using for the exposure?
> I would guess either your source isn't well collimated or your mask is
> not well contacted with the wafer.
>
> Abhishek Jain wrote:
> > I am making SU-8 2025 masters on Si for PDMS replica molding. I use a
> > mylar mask and the structures are ~25um tall. I have a problem that I
> > do not get good vertical walls of SU-8. A 15um feature comes out as a
> > flat length of ~30um and then a linearly decaying thickness that makes
> > a total feature size of ~60um.

--
Research Assistant
Microfluidics Lab (Prof. J.D. Posner)
Department of Mechanical & Aerospace Engineering
Arizona State University
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