durusmail: mems-talk: RIE etching
RIE etching
2007-04-04
RIE etching
mohammed ashraf
2007-04-04
Dear all

I need to etch AZ9260 structures which are on SU8 substrate. Can anyone
suggest me a way to etch AZ9260 resist without affecting/etching SU8 in any
way ?

Regards

Ashraf

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