durusmail: mems-talk: CF4 etch of glass SiO2?
CF4 etch of glass SiO2?
2007-04-09
CF4 etch of glass SiO2?
Andrew Xiang
2007-04-09
Has anyone etched Glass using CF4 plasma? Can you visually see the effect? Does
it reduce the reflectivity of the glass by making the glass surface less smooth?

thanks
Andrew
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