Hello,

Thanks for your suggestion. We have tried with H2O2 to etch tungsten, but it
looks the solution attacks the resist (HiPR 6517) much quicker than 'W'. Can you
please suggest any Resist ( which can sustain enogh time) or methods to etch
effciently tungsten. Any advice will be greatly helpful.

Thanking you.

Best regards,
Shimul Chandra Saha
IET/NTNU
7491 Trondheim, Norway.

----- Original Message ----
From: Anil Agiral 
To: General MEMS discussion 
Sent: Friday, March 30, 2007 4:24:41 PM
Subject: Re: [mems-talk] Tungsten 'W' etch


Hello,

You can try H2O2 which is used to etch TiW. It should work well with W
etching also.