Alex-
     Try dry etching using CF4 and/or SF6.

Charlie Whitman.




"Freeman, Alex"  on 06/19/98
08:15:50 AM

Please respond to "Freeman, Alex"
      ; Please respond to
      mems-cc%ISI.EDU@interlock.lexmark.com

To:   MEMS%ISI.EDU@interlock.lexmark.com
cc:    (bcc: Charles Whitman)
bcc:  Charles Whitman
Subject:  fast nitride etching




Dear MEMS Community,

Does anyone know how to etch nitride faster than is possible by hot
phosphoric acid?  I am looking for etch rates of 50 - 100 A/sec.



~~~~~~~~~~~~~~~~~~~
Dr. Alex Freeman
Engineering Manager, Etch Group
Ball Semiconductor, Inc.
972-359-2442
afreeman@ballsemi.com
~~~~~~~~~~~~~~~~~~~