durusmail: mems-talk: Al oxide
Etching of intermetallic CuAu
2007-04-17
Al oxide
2007-04-18
Al oxide
Hongzhi CHEN
2007-04-18
Hello,

I am trying to use the native Aluminium oxide as the
insuloator, since if we expose the it in the air, Al
will oxidize itself to form severl nm aluminium oxide.
But when I expose that to the air to about 2 days, it
does not work.

Is there any special treatment should be done, or just
leave it to the air? Or is there any way can
accelerate the oxidation?

Thank you for any advice.

Chen
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