durusmail: mems-talk: Controlling evaporated metal roughness
Controlling evaporated metal roughness
2007-04-19
Controlling evaporated metal roughness
henson@bu.edu
2007-04-19
We'd like to deposit ~50nm Al layers with controlled surface
roughnesses ranging from ~5nm Rms to above 10nm Rms. I'm using a Sharon
e-beam evaporator system for the deposition but also have access to an
Edwards Thermal evaporator. The greater Rms roughness the better. Any
ideas?
Thanks,
John Henson
Boston University

reply