Dear Ning, Thank you for your reply. Because I read one science paper using the native aluminium oxide as the insulaotr for the carbon nanotube transistor and they did not mention any special treatment. I try to heat it up to 400oC, hopefully I will get a thicker oxide. Sincerely yours, CHEN Hongzhi --- "Ning Wu (nwu@Princeton.EDU)"wrote: > Hongzhi, > > I believe that native Aluminium oxide layer is very > thin, just like native silicon oxide, which may not > be thick enough to be used as a insulating layer.