Try Ammonia Cer (IV) nitrate in Nitric Acid. Merck (the German chemical supplier) has ready to use mixtures. They are dedicated to etch chromium, but should work with Nichrome as well. They have 2 different products: Issue No. 1.11547 Chromium Etchant VLSI Issue No. 1.10602 Chromium Etchant H VLSI Normally it's used for chromium masks. Best regard Armin P.S.: Has anyone a good wet etchant for Tungsten. >From mems-mgr@isi.edu Sat Jun 27 12:20:43 1998 >Received: (from daemon@localhost) > by darkstar.isi.edu (8.8.7/8.8.6) id MAA29858 > for mems-out-list; Sat, 27 Jun 1998 12:13:02 -0700 (PDT) >Received: (from mems@localhost) > by darkstar.isi.edu (8.8.7/8.8.6) id MAA29850; > Sat, 27 Jun 1998 12:13:01 -0700 (PDT) >Message-Id: <199806271913.MAA29850@darkstar.isi.edu> >Date: Fri, 26 Jun 1998 05:24:06 -0700 (PDT) >From: cjmm@ntl.pim.tsinghua.edu.cn >Subject: about etchants of Nichrome >To: MEMS@ISI.EDU >X-URL: http://mems.isi.edu/mems.html >Reply-To: cjmm@ntl.pim.tsinghua.edu.cn, mems-cc@ISI.EDU > > > I want to know how to make etchants of Nichrome which can be used with resist ! > > >Tang Yanghua > > > ______________________________________________________ Get Your Private, Free Email at http://www.hotmail.com