Hi kris, Use reverse pulse electroplating to minimize stress. Regards, Mo kebaili -----Original Message----- From: kris To: mems-talk@memsnet.org Subject: [mems-talk] Au electroplating Hello All, IS there a method to produce stress free Au electroplated structures?? I am using sulphite bath and 1.5mA/cm^2 of the current density. Ni is used as the seed layer. Please let me know your suggestions.