durusmail: mems-talk: isotropic silicon etchant
isotropic silicon etchant
1998-07-20
isotropic silicon etchant
Chelly Narayana
1998-07-20
I am looking for a wet chemical etching solution that etches silicon
isotropically and does not attack glass. If anyone out there know of any
means of doing this, please send me a mail to chelly@lucent.com

Thanks,
Chellappan


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