Streemanth, Vacuum dehydrate and vapor HMDS deposit in vacuum vapor prime. It holds up to more than a 30 minute etch in BHF. If moisture enters the equation the resist lifts in minutes. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 bmoffat@yieldengineering.com www.yieldengineering.com