durusmail: mems-talk: Quartz Etching
Quartz Etching
2007-05-17
2007-05-17
2007-05-18
XeF2 Etching Silicon
2007-05-18
2007-05-18
2007-05-18
Fused Quartz Cleaning
2007-05-30
2007-05-31
2007-05-21
Quartz Etching
Bill Moffat
2007-05-17
Streemanth,
           Vacuum dehydrate and vapor HMDS deposit in vacuum vapor
prime.  It holds up to more than a 30 minute etch in BHF. If moisture
enters the equation the resist lifts in minutes.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353
bmoffat@yieldengineering.com
www.yieldengineering.com
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