Dear MEMS fellows,

I'm searching spin-coatable (1~2um) polyimide that is sensitive to i-line
lithography. Since polyimide usuallly can't be coated for thickness in this
range, thinner may have to used together. Anyone has ideas on where I can get
this product? I've tried HD Microsystems but didn't get positive feedback. Thank
you very much.

Rgds,
Ebin