Hi,
I intend to fabricate an actuator (cantilever) in SU-8.  Now this actuator will
be sitting on Chromium as a release layer.  The Chromium will be deposited via
e-beam evaporation and as such cannot be too thick, but be around 100-200nm.  I
intend to use a Chromium wet etchant to etch the metal film to release the
cantilever.  The Chromium will be sandwiched between a SU-8 substrate and the
bottom of the cantilever, which is also SU-8.

Can anyone advise me as to whether there will be stiction problems with this
set-up.  I do not have any equipment for dry release.  Furthermore, it would
have been better if the sacrificial layer was a 50um thick uncrosslinked SU-8
rather than a 100-200nm film of Chromium.  However, the prospect of using
uncrosslinked SU-8 as a sacrificial layer is not open to me now.

Jeffrey