Matthew-

Electrode shaping has been used to linearize tip deflection of a cantilever to
voltage.  This should be possible with torsional actuation.  Alternatively,
design a nonlinear spring (one that stiffens with rotation).  Google has a lot
of references.

Both approaches with likely increase the maximum voltage you'll need for full
rotation without making the structure overly compliant/fragile.  The former
will be easier to micromachine compared to the latter.  Both will require some
non-trivial analysis/simulation.

Good luck!

Raj

--- matthew king  wrote:

> Hi,
>
> Is there any method to linearize the relationship
> between the voltage and rotation angle in a torsional
> micromirror? 3 degree rotation angle at most is OK.
>
> Any kind of help is appreciated.
>
> Best regards,
> Matthew King

--

Raj Gupta, PhD
http://terahz.org