Hi, I need to smooth the germanium surface using the chemical mechanical
polishing, and I need some help in the polishing slurry. I tried with
the Cabot SS-12 slurry which is designed for oxide polishing, it polishs
amorphous germanium ok but for crystalline germanium, it almost doesn't
polish at all. I also tried with the Cabot P1000 slurry which is
designed for polys-silicon, it doesn't polish either. Does anyone have
such information for the polishing? Any info will be deeply appreciated.
Thanks a lot,
Long