Shay,

I put an "anti-reflecting rubber placemat" underneath the glass wafer
during exposure (Hard contact mode)
I know, it is not quit an anti-reflective coating, but it does improve a lot.
SEM images sometimes show that the channels close to the wafer are open- at
least at the "intrances". It looks like a tunnel, but it is not clear if it is
open all the way through the channel (10-20 um lang).
Maybe it is not enough to suppress the reflections.

Thanks for Your suggestion.

Herman.

________________________________

Van: mems-talk-bounces@memsnet.org namens shay kaplan
Verzonden: vr 8-6-2007 18:37
Aan: 'General MEMS discussion'
Onderwerp: RE: [mems-talk] 2.5 um microchannels in SU-8

Sounds like reflections from the back of the glass
Shay