As mentioned, the channels are about 10 um deep ; 10 - 15 um long.

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Van: mems-talk-bounces@memsnet.org namens JBishop596@aol.com
Verzonden: zo 10-6-2007 18:11
Aan: mems-talk@memsnet.org
Onderwerp: Re: [mems-talk] RE: 2.5 um microchannels in SU-8

How deep are your channels?