Dear Friends,

Can anybody suggest me a better option than cool grease, for through etching
in DRIE .

The wafer to be through etched needs a support wafer, and I am always using
cool grease in between the support wafer and the actual wafer to be etched.

Cool grease removal is really a headache, it can break the delicate
structures.

I have heard about something like conducting tapes, which can be used
instead of cool grease.

if anybody knows about it or any other better option, please let me know...

Ashwini Jambhalikar