We use a thin layer of Crystalbond 509C wax to bond Si wafers to
backing wafers. You have to watch out for bubbles in the wax or you
can have die pop up.

Jim
On Jun 13, 2007, at 10:39 PM, ashwini jambhalikar wrote:

> Dear Friends,
>
> Can anybody suggest me a better option than cool grease, for
> through etching
> in DRIE .
>