Dear Dr. mems@ISI.EDU

Thank you everyone.

I'm eagerly looking for the high overlay accuracy aligner.

My R&D is on diffactive optics elements ( DOEs ) making.
I hope to make multi-level ( multi-step ) DOEs with aligner lithography and
etching on SiC or other material which can be reactively etched.

The first , I wish to look the high overlay accuracy aligner or make it with
aligner maker.
 The specification is <0.01 micron.

Do you know something on high overlay accuracy aligner machine ?
Please send me some e-mail.




Best regards,

                                  NALUX    http://www.nalux.co.jp
                                     R&D
                                       Atsushi Miyazaki
                                         E-mail : atushi_m@yo.rim.or.jp