durusmail: mems-talk: stress in polisilicon fixed-fixed beams
stress in polisilicon fixed-fixed beams
2007-07-05
2007-07-06
stress in polisilicon fixed-fixed beams
bhat soma
2007-07-05
Hi all,

I have one small doubt. I have fixed_fixed beam fabricated using polysilicon.

Let us assume that the material has inbuilt stress. In a normal beam with width
very large in comparison to thickness, we expect beam to bend verticaly up/down.

Now, if I make width small in comparison to thickness, will the beam bend
laterally?

with regards,

Somashekara Bhat,
Research Scholar,
Electrical Engineering Department,
F3-28, Zig-Zag Road,IIT Madras
Chennai - 36
Phone - 9444779063(mobile)
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