Jesse, Thank you for your mentoring. It was very helpful and made one questions. What kind of evaporator you use? I tried even lower deposition rate than you and it seems I need to use the same machine as you for the platinum coating. Thank you, Sokwon Jesse D Fowlerwrote: Sokwon, Assuming you're depositing thick Pt (over 1000 A in this case), the trick that worked for me was to deposit some Pt at a slow rate (0.5 A/s), then wait a while for it to cool, then deposit some more Pt, etc. The specific thicknesses and rates you need to use, I don't know. I was using AZ 5214, and it had been cooked pretty badly by the first deposition I tried (1800 A at 5 A/s). I was much more cautious the second time around (500 A at a time, 0.5 A/s). There's probably a higher deposition level that's happy. Jesse Fowler