durusmail: mems-talk: Platinum deposition problem
Platinum deposition problem
2007-07-03
2007-07-03
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2007-07-05
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Platinum deposition problem
sokwon Paik
2007-07-05
Jesse,

  Thank you for your mentoring.

  It was very helpful and made one questions.

  What kind of evaporator you use?

  I tried even lower deposition rate than you and it seems I need to use the
same machine as you for the platinum coating.

  Thank you,

  Sokwon

Jesse D Fowler  wrote:
  Sokwon,
Assuming you're depositing thick Pt (over 1000 A in this case), the trick
that worked for me was to deposit some Pt at a slow rate (0.5 A/s), then
wait a while for it to cool, then deposit some more Pt, etc.

The specific thicknesses and rates you need to use, I don't know. I was
using AZ 5214, and it had been cooked pretty badly by the first deposition
I tried (1800 A at 5 A/s). I was much more cautious the second time around
(500 A at a time, 0.5 A/s). There's probably a higher deposition level
that's happy.
Jesse Fowler
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