durusmail: mems-talk: polymer fabrication
polymer fabrication
2007-07-06
2007-07-09
anodic bonding and passivation layer thickness
How to get a sheet of Cr film via E-beam evap.
2007-07-09
2007-07-10
2007-07-10
2007-07-10
redeposition of SiO2
2007-07-11
plasma etching of SiO2 and its selectivity over resists
2007-07-12
plasma etching of SiO2 and its selectivity over resists
2007-07-12
Polystyrene bonding problem
2007-07-13
2007-07-13
2007-07-13
polymer fabrication
hammouche khales
2007-07-06
Hellos all, I have some questions if there is one ho need to help me!
- i need to have some informations for polymer fabrciation (especially  using
PDMS ),  and if there is contaminations problems with CMOS process?
- what the clean room class if we need to fabricate bio-chip (or microfluidic
devices)?
Thanks
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