durusmail: mems-talk: stress in polisilicon fixed-fixed beams
stress in polisilicon fixed-fixed beams
2007-07-05
2007-07-06
stress in polisilicon fixed-fixed beams
Qiao Dayong
2007-07-06
For beams with ultra small width, the beam will bend laterally as i observed in
my
experiment. I have the SEM photo of this phenomenon and if you need, I can send
it
to you.
>
>Hi all,
>
> I have one small doubt. I have fixed_fixed beam fabricated using polysilicon.
>
> Let us assume that the material has inbuilt stress. In a normal beam with
width
very large in comparison to thickness, we expect beam to bend verticaly up/down.
>
> Now, if I make width small in comparison to thickness, will the beam bend
laterally?
>
reply