Hello,
it's depend of the formula of your PDMS. A lot of no cured siloxanes are
highly fugitive and building films on all of the clean surfaces. This way
they are contaminating a clean room. But there are a few of PDMSs, witch are
special produced for a clean room production. Check you vendors (f. e. Dow
Corning, GE, Wacker Silicones and so one) to get specifications and product
data sheets.


With best regards,
Vitali Emelianov
-----------------------------

caesar research center
Group Microrobotics
Ludwig-Erhard-Allee 2
D-53175 Bonn, Germany

Tel. +49 (0) 228 9656 342
e-Mail: emelianov@caesar.de
www.caesar.de/1677.0.html


-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] Im
Auftrag von hammouche khales
Gesendet: Freitag, 6. Juli 2007 03:59
An: mems-talk@memsnet.org
Betreff: [mems-talk] polymer fabrication

Hellos all, I have some questions if there is one ho need to help me!
- i need to have some informations for polymer fabrciation (especially
using PDMS ),  and if there is contaminations problems with CMOS process?
- what the clean room class if we need to fabricate bio-chip (or
microfluidic devices)?
Thanks