Hi The clean room class depends on how small will be your structures, only for don't block your channels with dust or every else. I make fluidical channels about 50mu only under a simple laminar flow.( [8^) !!!) About the quantity of free monomers, you can clean your linked PDMS with organic solvents ( like acetonitrile or even acetone or isopropanol ) to get rid of then. If you want, drop me a line and I can search an article I've seen on eliminating free monomers from PDMS. Good Luck!!! NH > Betreff: [mems-talk] polymer fabrication > > Hellos all, I have some questions if there is one ho need to help me! > - i need to have some informations for polymer fabrciation (especially > using PDMS ), and if there is contaminations problems with CMOS process? > - what the clean room class if we need to fabricate bio-chip (or > microfluidic devices)? > Thanks