durusmail: mems-talk: plasma etching of SiO2 and its selectivity over resists
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2007-07-06
hammouche khales
2007-07-06
emelianov
2007-07-09
Rashid, Mamun
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H.J. van der Linden
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hung bost
2007-07-10
Shay Kaplan
2007-07-10
Anil Agiral
2007-07-10
Peter Svasek
redeposition of SiO2
2007-07-11
cal Bear
plasma etching of SiO2 and its selectivity over resists
2007-07-12
prabhu arumugam
plasma etching of SiO2 and its selectivity over resists
2007-07-12
Kirt Williams
Polystyrene bonding problem
2007-07-13
Rashid, Mamun
2007-07-13
Joseph Grogan
2007-07-13
Rashid, Mamun
plasma etching of SiO2 and its selectivity over resists
prabhu arumugam
2007-07-12
Hello all,
Could you please tell me some good references for
plasma etching of SiO2 and its selectivity over
resists.

Thanks
Prabhu

Prabhu Arumugam
Postdoctoral Researcher
NASA Ames Research Center
Bldg 229, Room 126
Mail Stop 229-1
Moffett Field, CA 94035
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