You probably need to add about 3-5% CF4 to your receipe. That should be enough
to etch the carbon filler material used in most polyimide formulations. Bob
Henderson


-----Original Message-----
From: Jill Yang 
To: mems-talk@memsnet.org
Sent: Thu, 16 Aug 2007 8:34 pm
Subject: [mems-talk] dry etch recipe for Prolift100 polyimide (Brewer Science)


Anyone used Brewer Science's polyimide (prolift-100)? How to dry etch a "clean"
via without residue? Oxygen plasma with photoresist mask doesn't do a good job
--- lot of grass at the bottom of the via.