WJ   KARL,

Hi.  When I was in graduate school at Auburn University in Auburn, AL USA, I
ran into the same problem.  I did find the solution though.  Being that that
was almost 10 years ago, I am not exactly sure where I found the
membrane/plate defletion equations, but I believe it was in one of 3 places:
old NASA studies (Auburn University was a  repository for those), a
Mechanical Engineering text book on elastic structures, or a Civil
Engineering text book on elastic structures.  I hope this helps.  If you
find what you are looking for, please let me know.

Sincerely

Robert Dean
RF CMOS Designer / Project Manager
MEMS Optical, Inc.
205 Import Circle
Suite 2
Huntsville, AL 35806
Tel. 256-859-1886
FAX 256-859-5890
email rdean@memsoptical.com