All my mask layers for fab will be:
1) #1 for pattern etching
2) #2 for Pt sputtering
3) #3 for surface modification with polymer material
4) #4 for another Pt sputtering

I am going to use a rectangle 3x3cm 100 Si substrate, and make all
these 4 mask layer on one piece 5" soda lime glass mask. Once the
fabrication comes to a lithography step, I will align the sub with
corresponding mask layer on this 5" glass mask. I was told it is
possible to do it manually on a suss MA8 mask aligner, but no detailed
instruction. Anyboday has any experiences on this alignment and would
give any details for the instruction?

Thank you so much in advance!

Best regards,
Steven