The MA8 is simply a manual aligner.  The details of how you would do
the alignment have everything to do with what sort of alignment marks
you have on your mask.

Also - I'm not sure that your 5" glass would fit in the mask frame of
a MA8.  Make sure it will before you have the mask made.


On 8/31/07, Steven Yang  wrote:
> All my mask layers for fab will be:
> 1) #1 for pattern etching
> 2) #2 for Pt sputtering
> 3) #3 for surface modification with polymer material
> 4) #4 for another Pt sputtering
>
> I am going to use a rectangle 3x3cm 100 Si substrate, and make all
> these 4 mask layer on one piece 5" soda lime glass mask. Once the
> fabrication comes to a lithography step, I will align the sub with
> corresponding mask layer on this 5" glass mask. I was told it is
> possible to do it manually on a suss MA8 mask aligner, but no detailed
> instruction. Anyboday has any experiences on this alignment and would
> give any details for the instruction?

--
Regards,
dbp