Hi Steven,

There are no known solvents that dissolve SU-8 in cross-linked form.
If you can find one, then you will have made a breakthrough. Rather
than dissolution, your main problem in the construction of polymer
microchannels on glass substrates is interfacial adhesion - solvents
will promote delamination at the glass-polymer interface. Have a look
at the following paper for a way to tackle this problem:

Improved polymer–glass adhesion through micro-mechanical interlocking,
M P Larsson et al 2006 J. Micromechanics & Microengineering 16
S161-S168

Good luck with your research.

Regards,

Michael

>
> >
> > ---------- Forwarded message ----------
> > From: "Steven Yang" 
> > To: mems-talk@memsnet.org
> > Date: Thu, 6 Sep 2007 19:48:23 +0800
> > Subject: [mems-talk] SU-8 dissolvable in Methanol solution?
> > Hi, all
> > I plan to do some SU-8 patterned microfluidic channel, and it might be
> > used for methanol flow. Does anybody have experience that SU-8 will be
> > dissolved in methanol or not?
> >
> > btw, I also like to know is it possible to sputtering some metal like
> > Cr/Au for patterned electrode on SU-8 layer? what will be the PR for
> > this lift-off process?
> >
> > and has anybody done the glass to SU-8 (which on Si sub) adhesion
> > bonding before? what will be the procedure for this?