durusmail: mems-talk: Mechanical properties of silicon
Mechanical properties of silicon
1998-08-04
Mechanical properties of silicon
Brian S Cheung
1998-08-04
My partner and I are undergraduate students who are working on a summer
project, the design of a MEMS accelerometer, for our prof.  We would like
to perform some CAD simulations of a silicon beam, but are lacking several
of the values for silicon's mechanical properties.  We're not looking
for highly detailed values, but some rough, crystal orientation
averaged numbers that would give us reasonable results.  Can anyone
recommend us to a good reference book, journal articles, web site, etc.
Even better, if someone has already performed some computer simulations,
we'd be grateful if you could share the property values used and how they
compared to the reality.

Much obliged.


               *    "And then the storm breaks, and it is not thunder at
Brian Cheung   *     all, but that entropic inner-ear whine of molecules
U of Toronto   *     breaking apart and whirling away."
EngSci 0T0     *                                -- Evolution's Shore
               *                                   Ian McDonald


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