For what it is worth, if anything. People who make superconducting chips etch this. Perhaps one of IBMs journals. You might google for squids and etch. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Sadhana Patil Sent: Friday, September 21, 2007 8:49 PM To: mems-talk@memsnet.org Subject: [mems-talk] Nb wet etching Hi all, Looking for some help on the kind of wet etchants available for etching Nb. I have vaguely heard about HF(1):HNO3(1). Does anybody have an idea of what is the etch rate of this chemical for Nb? Are there any other etchants available for Nb? And does it etch other metals like Au, Fe, CuMn, Ni? Thanks, ES...