Dear all,

What could be the reason of non-vertical sidewalls of SU8 mold? I got
pattern with wider bottom and narrower top. The depth of the mold is
400um. The width of the pattern varies from 20um to 80um with space
between them changes from 80um to 20um. I develop the wafer face down for
30mins with gentle shaking. Any comments? Thanks!

Best,

Peng