durusmail: mems-talk: Poly Silicon Resistivity
Poly Silicon Resistivity
2007-09-27
2007-09-27
Poly Silicon Resistivity
Rana, Mukti M
2007-09-27
Hello,

Can anyone suggest me the variation of resistivity of polysilicon with
doping concentrations? Reference of any paper or article will be
appreciated. Thank you.

Mukti M Rana


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