durusmail: mems-talk: Eutectic Au-In waferbonding
Eutectic Au-In waferbonding
2007-09-28
Eutectic Au-In waferbonding
P.E.M. Kuijpers
2007-09-28
Hi All,

Can someone of you provide me some bondsettings (Temp. time, pressure,
layerthickness)
for waferbonding of eutectic Au-In layers??

Thanks in advance.
Peter Kuijpers
MiPlaza
DTS/TFF
High Tech Campus 04
Room: WAGp5-11
5656 AE Eindhoven
The Netherlands

Phone.:  (+31 40 27) 98904 (mobex)
mobile:(+31) 06-12507027
fax.:     [+31 40 27) 44769
mailto:p.e.m.kuijpers@philips.com
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