Hi !

You should read this paper :

K.E. Petersen : " Silicon as a mechanical material ", Proceeding IEEE, 70,
5 p 420, 1982.
You should have a look in a Handbook af material properties as well.

Good luck

Eric


>My partner and I are undergraduate students who are working on a summer
>project, the design of a MEMS accelerometer, for our prof.  We would like
>to perform some CAD simulations of a silicon beam, but are lacking several
>of the values for silicon's mechanical properties.  We're not looking
>for highly detailed values, but some rough, crystal orientation
>averaged numbers that would give us reasonable results.  Can anyone
>recommend us to a good reference book, journal articles, web site, etc.
>Even better, if someone has already performed some computer simulations,
>we'd be grateful if you could share the property values used and how they
>compared to the reality.
>
>Much obliged.
>
>
>              *    "And then the storm breaks, and it is not thunder at
>Brian Cheung   *     all, but that entropic inner-ear whine of molecules
>U of Toronto   *     breaking apart and whirling away."
>EngSci 0T0     *                               -- Evolution's Shore
>               *                                  Ian McDonald
>
>
>
>
mailto:bonnotte@clamart.srpc.slb.com

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Eric Bonnotte

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