if you just want to make a mold to fabricate some PDMS structure, you can make a seed layer use SU8-5, or SU8-10. Spin SU8-5 to form a 3-4 microns layer, bake, and expose to UV(without mask), postbake, and develop, then bake it in oven at 175C for 2 hours. Then you can spin and pattern other thick SU8 layer without adhesion problem. Quoting Gareth Jenkins: > Omnicoat is certainly a good idea but good adhesion is also possible > with the following steps: > > Treat with conc. H2SO4 (I find this as good as Piranha and safer / > more eco-friendly since you don't need to make it fresh each time). > Thoroughly dehydrate. 200-220C for 30mins on a hotplate. > Ensure even and complete crosslinking with a higher exposure dose than > recommended. > Take account of stress during the PEB. If large areas are being > exposed, consider stress relief structures in the design. A lower > temperature PEB for longer time can greatly reduce delamination > effects. >